A High-order Terminal Iterative Learning Control Scheme
نویسندگان
چکیده
A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control proole. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processing chemical vapor deposition (RT-PCVD) thickness control problem in wafer fab industry.
منابع مشابه
Terminal iterative learning control with an application to RTPCVD thickness control
A special type of iterative learning control (ILC) problem is considered. Due to the insu$cient measurement capability in many real control problems such as Rapid Thermal Processing (RTP), it may happen that only the terminal output tracking error instead of the whole output trajectory tracking error is available. In the RTP chemical vapor deposition (CVD) of wafer fab. industry, the ultimate c...
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